1. Air Filtration Multi-stage filtration — pre-filter, medium
filter, HEPA/ULPA terminal — strips airborne particles to levels
compliant with the target ISO 14644-1 classification. This is the
foundational function upon which all others depend.
2. Airflow Management Clean air is directed through the space via
turbulent dilution or laminar displacement patterns, sweeping
contaminants away from generation sources and preventing particle
settlement on critical surfaces.
3. Temperature & Humidity Control The HVAC system holds temperature
within ±0.5°C to ±2°C and relative humidity within ±3% to ±5% RH,
delivering a stable thermal-humidity envelope for precision
processes.
4. Pressure Cascade A 5–15 Pa positive pressure gradient is
maintained between clean and less-clean zones. Physics handles the
rest — air flows only outward, blocking external contamination at
every boundary.
5. Physical Containment Clean wall panels, sealed ceilings, and
airtight doors form a fully enclosed shell. All joints are sealed,
all internal corners are radiused, eliminating every surface where
dust could accumulate.
6. ESD Grounding Conductive flooring integrated with the grounding
system maintains surface resistance within the 10⁴–10⁹ Ω range,
continuously bleeding static charges from personnel, equipment, and
materials.
7. Personnel & Material Decontamination Gowning rooms, air showers,
buffer zones, and pass boxes create a staged entry protocol —
physically stripping contamination from people and items before
they reach the clean zone.
8. Real-Time Monitoring Online particle counters, pressure
transducers, and temperature/humidity sensors stream live data to a
central monitoring system, enabling instant deviation alerts and a
fully traceable operational record.
